Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 151
8
MAINTENANCE
8.6 When error message is not displayed on LCD
When the "FAILURE" LED illuminates and the LCD displays an error message, refer to Table 38 to
Table 45.
8.6.1 Abnormalities when powering ON
No.
Symptom
Probable cause
Countermeasures
Referred section
1
The "POWER"
LED does not
illuminate.
Incorrect connection of
power cable.
Connect the power cable
correctly.
Section 3.6.3
Abnormal power
voltage.
Set the voltage to rated voltage
10%.
Section 2.1
Section 3.6.3
Power failure.
Check if a power failure has
occurred.
Section 8.1.1
Table 46 - Troubleshooting when powering ON
8.6.2 Abnormalities when performing rotational operation
No.
Symptom
Probable causes
Countermeasures
Referred section
1
The "ACCEL."
LED does not
illuminate.
The "MANUAL/
REMOTE"
changeover switch is
not in the correct
position.
Slide the "MANUAL/ REMOTE"
changeover switch to the correct
position.
Section 3.2
Section 4.4
Section 4.5
Rotation INHIBIT
signal input pins (X7
REMOTE (1)-(5)) are
open.
When not using this function,
short the circuit between (1)-(5),
or set "Inhibit Command" to
"DISABLE".
If these pins are open, the STP
pump will not rotate after
performing the start operation.
Section 4.5.1
Section 3.11
Table 47 - Troubleshooting when performing the STP pump start operation