Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 113
5
SERIAL COMMUNICATION PROTOCOL
5.4.15 ReadMeasValue
Function: Reads the Built-in TMS temperature, motor temperature and measured rotational speed.
The motor temperature value is the same temperature as "ReadMotorTemp". The measured
rotational speed value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
Transmission frame:
*1
PC->SIM
Stx
0
0
1
?
[
Etx
LRC
SIM->PC
Ack
PC->SIM
*1
Ack
SIM->PC
Stx
0
0
1
Sp
[
Parameter 1 to 6
Etx
LRC
*1 The HEX code of ASCII character ’[’ is "5B".
Parameter
Item
Data format
Remark
1
[System reservation]
120-bits hexadecimal
coded ASCII
2
Built-in TMS temperature (Unit ºC)
16-bits hexadecimal coded
ASCII
3
Motor temperature (Unit ºC)
16-bits hexadecimal coded
ASCII
4
[System reservation]
40-bits hexadecimal coded
ASCII
5
Measured rotational speed (Unit: Hz)
16-bits hexadecimal coded
ASCII
6
[System reservation]
64-bits hexadecimal coded
ASCII