Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 114
5
SERIAL COMMUNICATION PROTOCOL
Example:
Built-in TMS temperature: 3C
hex
= 60 ºC (140ºF)
Motor temperature: 14
hex
= 20 ºC (68ºF) or more
Measured rotational speed: 02DC
hex
= 732 Hz = 43,920 rpm
Parameter
1
ASCII
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
HEX
Parameter
1
2
ASCII
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
0
0
3
C
HEX
30
30
33
43
Parameter
3
4
5
ASCII
0
0
1
4
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
0
2
D
C
HEX
30
30
31
34
30
32
44
43
Parameter
6
ASCII
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
HEX
*1 System reservation