SCU-1601 Control Unit for Turbomolecular Pump
8.5 Error at self test state
When an abnormality/error occurs during the self test while operating the ON switch, the safety
function operates, the "FAILURE" LED illuminates and an alarm signal is output from the X7 REMOTE
connector (see Table 9). An error message showing "CAUTION" on the upper line and the contents of
the error are displayed on the lower line of the LCD. If an abnormality/error is found, take measures in
accordance with Table 37.
CAUTION
Coupling is Changed
The standard specification
pump of STP-XA2703 /
XA3203 is connected.
Confirm if the appropriate
STP pump is connected.
Perform tuning.
Check the various settings.
Section 4.2.2
Section 3.9.1
CAUTION
Different Pump ID
Failure of the SCU-1601 or
STP pump.
CAUTION
PCB is Initialized
PCB is Corrupted
CAUTION
Pump is Initialized
Failure of the SCU-1601 or
STP pump.
CAUTION
Pump&PCB are
Initialized
Failure of the SCU-1601 or
STP pump.
CAUTION
PumpType is Mismatch
The inappropriate STP pump
is used.
Confirm if the appropriate
STP pump is connected.
CAUTION
Tuning Error 1
:
:
Tuning Error 19
After turning OFF and ON,
perform turning.
If the RESET operation does
not reset error message,
contact Service office.
Motor resistance
measurement is impossible.
After turning OFF, connect
the STP connection cable
correctly. Perform tuning
after power ON operation. If
the RESET operation does
not reset error message,
contact Service office.
CAUTION
Tuning Not Completed
Turning is not completed.
Please contact
a service centre
The control parameter is not
in the memory of the STP
pump.
Table 37 - Error messages at self test state