Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 60
4
OPERATION
Pin
Description
Pins for inputting the second speed select signal (valid in both
MANUAL and REMOTE operations).
When pins (1)-(23) are set to close, rotational speed will be
second speed in the normal state.
When using this function, set the second speed option to the
"ENABLE" (Parallel port operation) (see Section 3.11,
"Parameter set mode").
(18), (36)
For the serial communication of the R485 (COM2). See
Section 5, "SERIAL COMMUNICATION PROTOCOL" for
details.
(2), (19), (20), (31), (34)
These pins are not used.
CAUTION
DO NOT connect anything to these pins. Doing so may
damage the SCU-1601 or the vacuum equipment.
Table 9 - X7 REMOTE input signal pins (continued)
(23)
OPT2 IN