Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 38
3
INSTALLATION
Error Record n #/n
Failure message
Error Record n #/n
2023/Aug/09 16:32
Error Record n #/n
NORM : 27960rpm
ENTER
Error Record n #/n
MOTOR TEMP : 98
Error Record n #/n
MOTOR CURRENT : 66%
Error Record n #/n
TMS SENSOR:@ 60
Error Record n #/n
undef_ID4_: ___
Error Record n #/n
undef_ID3_: ___
Error Record n #/n
undef_ID2_: ___
Error Record n #/n
undef_ID1_: ___
*1
*1
*1
*1
Figure 27 - Error Detailed Information
*1 undef_ID1_ and undef_ID2_ and undef_ID3_ and undef_ID4_ are information for sensors and heaters and valves for the
TMS to be added by connecting the STC-U. STC-U is an external TMS unit that can increase the number of sensors and
heaters and valves for TMS function.