Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 37
3
INSTALLATION
NORM:*****rpm Pump Type STP xxxxx
Software Version Ver 95 xxxxxx
Driver Version PM xxxxxx
Digital AMB Version AM 95 xxxxxx AMB Parameter Ver xxxxxx Pump Hour Counter Xxxxx H
Date Time 2023/AUG/xxxxxx
Pump Serial Number xxxxx
Ctrl Hour Counter Xxxxx H
Start Counter xxxxx
Damage Limit Counter xxxxx
Motor Temp xxx

TMS Set Point xxx

2nd Speed Set Point xxxxx rpm
2nd Speed Option DISABLE
Inhibit Function DISABLE
TMS Function DISABLE
LEAK VALVE Option DISABLE
Warning Imbalance ENABLE
Warning Damage Point ENABLE
Warning Pump Runtime DISABLE
Warning PumpOverload DISABLE
Error Record n n/n failure message
Error Record n 2/n failure message
Ctrl Serial Number xxxxx Speed Set Point xxxxx rpm Remote mode I/O Remote Error Record n 1/n failure message
UP
DOWN
SELECT
A B C D E F
Motor Current xxx %
A. Operation mode
B. Version information
C. Individual information
D. Current settings
E. Current function settings
F. Error record
Figure
26 - Confirmation mode