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Edwards SCU-1601

Edwards SCU-1601
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SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 40
3
INSTALLATION
3.11.7 Optional output signal setting (Emergency vent valve setting)
Enable/Disable the optional signal. When a failure of the magnetic bearing is detected, in the state of
the emergency vent valve function is effective, the emergency vent valve operates. Disable the
function when the emergency vent valve is not fitted on the STP pump connected to the SCU-1601.
Second speed function and option signal setting cannot be enabled simultaneously.
3.11.8 Second Damage Limit setting
Enable/Disable the rotational operation after "Second Damage Limit" occurs. When setting to
"ENABLE", "START NOT ALLOWED" is displayed and the rotational operation cannot be performed.
When setting to "DISABLE", "Second Damage Limit" is displayed, though the rotational operation can
be performed.

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