Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 143
8
MAINTENANCE
Referred
section
3.4.1 3.4.3
*1 The driver
output
stops and the rotor continue
rotating by inertia.
It may take several hours to stop
. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table
38 - Error
messages after self tes
t
Countermeasures
Check the vacuum piping system for leakage. Check the exhaust sequence.
Contact
Service office.
1.
Perform rotational
operation after resetting.
2.
Contact
Service
office.
Contact
Service office.
Contact
Service office.
1. Set the ambient
temperature to 40 ºC (104 ºF) or less.
2. Remove obstacle from the
ventilation port.
Probable causes
Atmospheric air flows the STP pump
.
Failure of the
SCU-1601.
1. Malfunction by external
noise
.
2. Failure of the SCU
-1601.
1. Disconnection of
connection cable or
at
connector part
2. STP pump failure
.
Short
-circuit or ground fault in
the connection cable or at connector part
.
1. High ambient temperature. 2. Insufficient cooling of the
SCU-1601.
Pump operation
Decelerate and stop, then Touch down
.
The magnetic bearing output stops and the rotor is descended on the protection bearing.
Free run.
*1
Decelerate and stop
Touch down
. The
magnetic bearing output stops and the rotor is descended on the protection bearing.
Touch down
. The
magnetic bearing output stops an
d the
rotor is descended on the protection bearing.
Continuance of rotation.
Occurrence condition
Rotational speed rises when deteriorating or stopping.
When the rated operation does not stop approx. 30 min. after start operation is executed.
Accelerate up to 500
rpm
or less
.
Disconnection of magnetic bearing control current.
Excessive magnetic bearing electric current
.
Overheat inside the SCU-1601.
LCD Messages
Aberrant Accel
Aberrant Brake
Accel Malfunction
AMB Ctrl Lost
Amp
Overcurrent
CAUTION: CNT heat1