Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 34
3
INSTALLATION
Software Version
95_**.*
Autotest
2023/MAY/20 15:40
Autotest complete CAUTION
Coupling is Changed
CAUTION
Pump Type is Changed
STP-XA2703/XA3203
DATA COPY? No
STP-XA2703/XA3203
DATA COPY? Yes
A
Press RESET 3sec
to Update Data
Updating Data
from Pump to PCB
Tuning
STP-603/1003
Tuning
Tuning complete
Levitation
B
C
D
A.
Press "RESET" switch
C.
Press "ENTER" switch
B.
Press "UP" or "DOWN" switch
D.
Press "RESET" switch for more than
3 seconds
Figure 25 - Tuning procedures