EasyManua.ls Logo

Edwards SCU-1601

Edwards SCU-1601
173 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 33
3
INSTALLATION
Note: Tuning can be performed only while the STP pump is in the LEVITATION state. (It cannot be
performed while the STP pump is in the ACCELERATION, NORMAL OPERATION, or
BRAKE state)
When performing the tuning during remote operation, press the "RESET" switch on the front
panel after switching the "REMOTE" switch to MANUAL. (The remote signal cannot be used
for tuning)
Once tuning is completed, re-tuning is not required unless the configuration (the STP pump
serial number, the SCU-1601 serial number, and the STP connection cable length) is
changed.
Although the STP pump produces an abnormal noise during tuning, this is not an indication of
abnormality.

Table of Contents

Related product manuals