Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 125
5
SERIAL COMMUNICATION PROTOCOL
Example:
Measured temperature 1
: 9B
hex
＝155 ºC
Measured temperature 2
: 50
hex
＝80 ºC
Measured temperature 3
: 96
hex
＝150 ºC
Measured temperature 4
: E0
hex
＝-32 ºC
Output device 1 condition
: 01
hex
＝Heater ON/Water valve Open
Output device 2 condition
: 01
hex
＝Heater ON/Water valve Open
Output device 3 condition
: 00
hex
＝Heater OFF/Water valve Close
Output device 4 condition
: 00
hex
＝Heater OFF/Water valve Close
Motor temperature
: 002A
hex
＝42 ºC
Motor current
: 19
hex
＝2.5 ºC
Measured rotational speed
: 19
hex
＝2.5
Parameter
1
2
3
4
5
6
ASCII
0
0
1
B
9
B
5
0
9
6
E
0
0
1
HEX
30
30
31
42
39
42
35
30
39
36
45
30
30
31
Parameter
7
8
9
10
11
12
ASCII
0
1
0
0
0
0
0
0
2
A
*1
*1
1
9
HEX
30
31
30
30
30
30
30
30
32
41
31
39
Parameter
13
14
ASCII
*1
*1
*1
*1
*1
*1
0
2
D
C
HEX
30
32
44
43
*1 System reservation