Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 51
3
INSTALLATION
Levitation NORM:*****rpm
Manual Operation
TMS Heater OFF
Manual Operation
TMS Heater ON
SELECT
UP DOWN
SELECT
ENTER
UP
DOWN
DOWN
＋
Manual Operation
TMS WaterValve Close
Manual Operation
TMS WaterValve Open
UP
DOWN
Manual Operation
Leak Valve Close
Manual Operation
Leak Valve Open
UP
DOWN
SELECT
SELECT
SELECT
Manual Operation
undef_OD1 None
Manual Operation
undef_OD2 None
SELECT
Manual Operation
undef_OD3 None
SELECT
A
B
C
D
E
F
G
Manual Operation
undef_OD4 None
SELECT
H
Figure 34 - Manual operation method
A.
Operation mode
E.
undef_OD1
B.
TMS heater
F.
undef_OD2
C.
TMS water valve
G.
undef_OD3
D.
Emergency vent valve
H.
undef_OD4