Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 9
1
INTRODUCTION
1
TMS sensor branch cable
7
STC-U remote branch cable
2
Outlet port heater cable
8
STC-U remote cable
3
TMS heater cable
9
Power extension cable
4
TMS valve cable
10
Power cable
5
STP connection cable
11
Outlet port heater
6
TMS valve
Figure 10 - System configuration (with outlet port heater)
STP
control
unit
STP pump
10
3
2
1
STC-U
eTMS
unit
9
4
6
5
7
8
11