Chapter 1 Overview
Data Format
■Command Data Format
Command data sent from the computer has the following format.
address, main command [, optional parameter] delimiter
Address
Reference
This communication function recognizes address 1 to 16. Single digit
address can be preceded with a "0" as in "01, 02, 03 … " or the "0" can be
left out. A comma (,) must separate the address and main command.
■Response Data Format
The response data returned from the chamber to the computer has the
following format.
reception status data or monitored data delimiter
Reference
About Main Commands and Optional Parameters
•
Main commands and optional parameters are expressed as ASCII text in
either capital or small case letters.
•
Spaces between characters are automatically deleted.
•
Temperature and control output data are valid to one place below the
decimal. All other numerical data is recognized as a whole number.
9
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