ESPEC EHS-221 - Error Messages

Chapter 1 Overview
Error Messages
When command data sent from the computer is not correctly processed by the
chamber, the chamber returns an "NA :" code attached with an error message.
These messages and their meaning are given here below.
Table 1.1 Error messages
Error message Meaning Example
CMD ERR
Chamber could not recognize
the command data.
•
If "MOD?" is sent as the command.
The correct command is "MODE?"
ADDR ERR Invalid address expression
•
If an unacceptable data format is
specified as the address
CONT NOT READY-1
The chamber could not execute
the command.
•
If a command is sent while making
settings from the operating panel
CONT NOT READY-2
The chamber could not execute
the command.
•
If a command is sent while control
power is OFF
CONT NOT READY-3
The chamber could not execute
the command.
•
If a command is sent when the
chamber is not in the STANDBY
process
CONT NOT READY-4
The chamber could not execute
the command.
•
If a command is sent when
operations are not ready to start
CONT NOT READY-5
The chamber could not execute
the command.
•
If an inapplicable command is sent
during operation
CONT NOT READY-6
The chamber could not execute
the command.
•
If a constant mode command is
sent when the chamber is not in the
constant mode
CONT NOT READY-7
The chamber could not execute
the command.
•
If a program mode command is sent
when the chamber is not in the
program mode
CONT NOT READY-8
The chamber could not execute
the command.
•
If an overflow error occurs
CONT NOT READY-9
The chamber could not execute
the command.
•
If a time-out occurs while
calculating the program mode
pattern total time
PARA ERR Parameter error
•
The parameter is missing in the
command.
•
If the attached parameter cannot be
recognized because it is wrongly
written, etc.
DATA OUT OF RANGE
Data is out of the specified
range.
•
If an option parameter is input out of
the setting range
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