Chapter 1 Overview
■E-BUS Mode
When the E-BUS mode is selected as the data transfer mode, you have the
choice of using echo back or not.
•
When Echo Back is ON
When echo back is ON, the chamber returns responses to the computer in
the below format.
＜
Response to setting commands
＞
reception status data delimiter
＜
Response to monitor commands
＞
reception status data delimiter monitored data delimiter
Therefore, when the entire response data including the delimiter is treated as
a single data set, data transfer is as follows.
Computer
Chamber
Setting command
When a processable setting
command is received
"OK : setting command"
Monitor command
When a processable monitor
command is received
"OK : monitor command"
"response"
13
To Next Page
Loading...
