3: Detailed User Interface Features
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Press ‘Start’ at the bottom of the pop-up to begin the validation of the ‘NIST Traceable
Reference Tube’ test.
Note: The test will take approximately 5 minutes to complete, this includes indexing, edge
detection as well as acquiring 20 measurements for each wafer (60nm & 100nm).
Once the validation test has completed, you will see the ‘Validation Result‘ (pass/fail) pop-up,
click ‘OK’ to close this pop-up. The important information you will be looking for is a ‘Pass’
(green thumbs up) pop-up and the actual wafer thicknesses in green. (thicknesses in green
indicates the measurement is within +- 5% of the ‘Expected Thickness’)
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