µPG 501
User Guide iii
Table of Contents
Table of Contents ........................................................................................................... iii
Preface ............................................................................................................................ 1
Conventions used ..................................................................................................... 1
Safety Information ..................................................................................................... 1
Related Documentation ............................................................................................ 1
Contact ..................................................................................................................... 2
System Description .......................................................................................................... 3
System Startup and Shutdown ........................................................................................ 5
Startup ...................................................................................................................... 5
Shutdown .................................................................................................................. 5
Restart ...................................................................................................................... 5
Design Data ..................................................................................................................... 6
Exposures ........................................................................................................................ 7
Choice of Substrate .................................................................................................. 7
Exposure Procedure ................................................................................................. 8
Substrate Processing .............................................................................................. 26
Exposure Optimization ................................................................................................... 28
Tools Menu .................................................................................................................... 30
Initialize Stage ........................................................................................................ 30
Control Panel .......................................................................................................... 30
Troubleshooting and Maintenance ................................................................................. 32
Functional Problems ............................................................................................... 32
Exposure result problems ....................................................................................... 33
Advanced Troubleshooting ..................................................................................... 34
Fuses ...................................................................................................................... 35
Maintenance ........................................................................................................... 35
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