HEIDELBERG mPG 501 - Exposure Result Problems

µPG 501
User Guide 33
- system is not well leveled
Remedies:
- check air pressure (see system installation instructions on required values)
- check on interlock lamp before starting a new exposure
- reset stage (menu Tools
 Initialize Stage)
- check and improve leveling as described in the system setup section
EXPOSURE RESULT PROBLEMS
Problem:
Plate is blank
Possible causes:
- structures too small
- energy too low
- developer too old /wrong type / wrong mixture
- LED off or damaged
Remedies:
- check design against design rules and lens resolution
- try higher energies
- use fresh developer
- check if light can be seen in the monitor during exposure
Problem:
Plate is completely exposed
Possible causes:
- stray light
- old materials
Remedies:
- check for possible stray light sources and eliminate them
- use fresh batch of plates and fresh chemicals
Problem:
Some structures are missing
Possible causes:
- structures do not comply with design rules or are too small
- developer or chrome etch old
- air bubbles in structures during etching
Remedies:
- check design against design rules and lens resolution
- use fresh chemicals
- avoid drying of the substrate between developing and etching, or water the plate
thoroughly before etching
Problem:
Design is shifted
Possible causes:
- wrong selection of design origin
- wrong entry of coordinates during alignment