HEIDELBERG mPG 501 - System Description

µPG 501
User Guide 3
System Description
The µPG 501 lithography system consists of the lithography unit and a control PC.
1 - Cover lid with interlock circuit
2 - System base
3 - Stage
4 - Vacuum field adjustment screws
5 - Vacuum switch
6 - Write head
7 - Vacuum and compressed air supply lines
8 - Optics cover
9 - Power on/off indicator lamp
10 - Safety interlock lamp
11 - Service connector
Figure 1: µPG501 lithography unit front side
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8
6
3
2
7
5
4
9
11
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