µPG 501
4 User Guide
12 - Ventilation slits (positions vary)
13 - Lithography unit power connector and On/Off switch
14 - Heat exchanger of LED water cooling circuit
15 - Compressed air connector (quick connector)
16 - USB connector for DMD data
17 - Network connector for LAN
18 - Compressed air regulation stage
19 - Compressed air regulation autofocus
20 - Ejector pressure regulator
Figure 2: µPG501 lithography unit back side
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