µPG 501
User Guide 29
5. On the left, select the distances between the fields. If only one series was selected,
only a step size in x can be entered. If Both Series was selected, also a step size
in y is required. The size of the design selected for exposure is shown below the
text boxes for reference. If the entered step size values result in an overlap, a
warning is issued, but exposure can nevertheless be started. The fields will be
arranged symmetrically around the current position.
6. Click on Start Exposure Series. During exposure, the Field Number text box
shows which field is being exposed, and the overall progress can be seen in the
progress bar. The exposure can be interrupted at any time using the Stop
Exposure button.
7. When the series is finished, click on Unload and follow the instructions. Process
the substrate as usual and evaluate the structure quality to find the best
(combination of) values.
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