W33: Amp T < 10 °C
- The temperature sensor in the preamplifier signals
T < 10 °C.
Run-up time for the forevacuum pump will be longer.
- Temperature sensor faulty.
E34: MSV U24 > 18.3 V
Signal MVPZN on the MSV board is active;
24 V signal voltage is too low U < 18.3 V.
- Fuse F1 on the MSV board has blown.
- 24 V power supply voltage is missing.
!!! Switch the UL 200 off!!
The missing voltage will cause the exhaust valve on the
rotary vane pump to close which in turn can lead to a
contamination of the vacuum system.Clean the UL 200
as required and check the oil level.
- Reference voltage UREF on the MSV board XT7/1 is
too high > 5 V.
E35: MSV Anod-Cat-U > 130 V
Anode-Cathode voltage is too high, U > 130 V.
MSV is faulty.
E36: MSV Anod-Cat-U < 30 V
Anode-Cathode voltage is too low, U < 30 V.
MSV is faulty.
E37: MSV Sup-Nom U>>
Signal MFSZH on MSV board is active.
Suppressor signal command variable is too high.
- Suppressor voltage has a short circuit.
MSV is faulty.
E38: MSV Sup-Pot > 363 V
U > 363 V
MSV is faulty.
E39: MSV Sup-Pot < 297 V
U < 297 V
MSV is faulty.
E40: MSV Anod-Pot U>>
The actual anode potential exceeds its nominal value by
10 %.
The nominal value can be displayed in the service menu
(line 55).
MSV is faulty.
E41: MSV Anod-Pot U<<
The actual anode potential has dropped below its nomi-
nal value by over 10%. The nominal value can be dis-
played in the service menu (line 55).
MSV is faulty.
E42: MSV Anod-Nom U>>
Signal MFAZH on MSV board is active.
- Anode voltage has been short-circuited.
- Nominal value of the anode voltage is too high. Anode
voltage is limited to about 1,200 V.
E43: MSV Cat-Heater I>>
Signal MPKZH on MSV board is active; cathode current
is too high;
I > 3.6 A
MSV is faulty.
E44: MSV Cat-Heater I<<
Signal MPKZN on MSV board is active; cathode current
is too low;
I < 0.2 A
MSV is faulty.
W45: MSV Cathode 1 defect
Signal MSIBE on MSV board is not active.
Emission for cathode 1 can not be switched on.
UL 200 switches to cathode 2.
Warning is repeated when switching on the UL 200 the
next time. The warning will cease to appear when swit-
ching on the emission for cathode 1 manually through
the service menu.
Order a new ion source.
W46: MSV Cathode 2 defect
Signal MSIBE on MSV board is not active.
Emission for cathode 2 can not be switched on.
UL 200 switches to cathode 1.
Warning is repeated when switching on the UL 200 the
next time.
The warning will cease to appear when switching on the
emission for cathode 2 manually through the service
menu.
Order a new ion source.
E47: MSV Cathodes defect
Signal MSIBE on MSV board is not active.
Emission can not be switched on.
- Exchange the cathodes by exchanging the ion source.
After having exchanged the ion source it must be pos-
sible to switch on both cathodes manually via the servi-
ce menu.
E48: MSV Fuse F2 defect
Signal MSAFD on MSV board is active; anode heater
fuse has blown.
Replace fuse F2 on the MSV board.
E49:TMP-Fail
Signal on the NT 12 is active.
Turbomolecular pump has failed.
Priority: 1
- Fuse (1 A) in the NT 12 has blown.
- Turbomolecular pump is faulty.
E50:TMP No Clock
Clock from the frequency converter has failed.
Priority: 2
- NT 12 is faulty.
E51:TMP-Freq F>1100 Hz
TMP frequency is too high f = 1100 Hz
Priority: 3
- NT 12 is faulty.
39
TH 10.211/8.02 - 12/97
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