E52:TMP-Freq F<<,t>5min
TMP frequency is too low.
The frequency of f = 1000 Hz has not been reached after
t = 5 minutes.Time t starts as soon as the pressure has
dropped below the PV threshold pressure of
PV = 1 mbar;
Priority: 3
- NT 12 is faulty.
- Turbomolecular pump is faulty.
E53:TMP-FREQ<<
TMP frequency too low.
- Signal TMP-Normal is no longer active
- Fuse F4 has blown
- NT 12 faulty
- Turbomolecular pump faulty
E54: Electr.T>60 °C
The temperature on the electronics side is too high
T > 60 °C.
- Ambient temperature is too high.
- Internal ventilation has failed.
- Air filters are dirty and must be exchanged.
W55: Electr.T<10°C
- The temperature sensor on the wiring plane indicates
T < 10 °C.
The forevacuum pump will take longer to run up.
- The temperature sensor is faulty.
E56: PE defect U<270mV
U < 0.27 V; filament broken.
Exchange the sensing cell on the Thermovac which
measures PE.
E57: PE U>9.5V
The bridge voltage PE > 9.5 V for over 500 ms; see ser-
vice menu item 92.
Realign on I/O board, or exchange the sensing cell on
the Thermovac gauge (short circuited or low resistance
filament).
This error message is not checked during the pumpdo-
wn process and during „Vent“.
E58: PV defect U<270mV
U < 0.27 V; filament broken.
Exchange the sensing cell on the Thermovac which
measures PV.
E59: PV U>9.5V
The bridge voltage PV > 9.5 V for over 500 ms; see ser-
vice menu item 92.
Realign on I/O board, or exchange the sensing cell on
the Thermovac gauge (short circuited or low resistance
filament).
This error message is not checked during the pumpdo-
wn process and during „Vent“.
W60: PV> 1mbar,t=5min
Pv > 1 mbar after t = 5 minutes since switching on.
Run up time for the forevacuum pump is too long.
E61: Emission Fail
Emission should be switched on. MSV subassembly indi-
cates a fault.
MENB emission current not within range.
E62: Capillary blocked
In the sniffer mode the intake pressure of the sniffer line
is controlled. If the pressure falls below 0.1 mbar, the flow
through the capillary is too low (contamination) or the
capillary is blocked (foreign objects, particles).
E63: Capillary broken
In the sniffer mode the intake pressure of the sniffer line
is controlled. If the pressure exceeds 0.3 mbar, the flow
through the capillary is too big (no leak tightness, broken
capillary)
Application-Related Problems
W71: No Part. Flow Valve
No return signal from the partial flow valve after it has
been activated.
24 V missing at OPTION pin 6.
Partial flow valve has not been properly connected or it
is faulty.
W72: Emission Off PE>>
PE >> 0.2 or 3 mbar.
Due to an air inrush, for example.
The UL 200 will again try to resume the measurement
mode.
W73: Emission Off PV>>
PV >> 0.2 or 3 mbar
Due to an air inrush, for example.
The UL 200 will again try to resume the measurement
mode.
W75: EVAC stopped Time 1
See explanations for menu item 10.
- Check the application.
- Optimize Time 1.
W76: EVAC stopped Time 2
See explanations for menu item 10.
- Check the application.
- Optimize Time 2.
E77: Peak not in Range
The signal maximum has shifted to the mass range alig-
nment limits.
- Check the basic setting for the anode voltage through
the service menu.
- Check calibrated leak.
W78: Difference too small
The amplifier voltage difference between opened and
closed calibrated leak is less than 10 mV.
Calibrated leak has not been closed properly.
40
TH 10.211/8.02 - 12/97
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