MKS 902B - Specifications

902B Abs Piezo Operation manual
52
Specifications
Measuring range: 0.1 to 1000 Torr (absolute)
Accuracy
(1)
10-1000 Torr: ±1% of reading
Repeatability
(1)
±0.3% of full scale
Maximum pressure: 1500 Torr
Supply Voltage: 9-30 VDC
Power consumption: <1.2 watt
Fuse (thermal recoverable): 200 mA
Analog output (MKS standard): 0-10 VDC
Analog output 1 resolution: 16 bit
Analog output 2 resolution: 12 bit
Analog output impedance: 100 Ω
Analog output update rate: 16 Hz
Setpoint relay range: 1-1000 Torr
Setpoint relay contact rating: 1A @ 30 VDC/VAC (resistive load)
Setpoint relay contact resistance: 100 mΩ (max)
Setpoint relay contact endurance (1 A @ 30 VDC load): 100,000 (min)
Setpoint relay contact endurance (0.2 A @ 30 VDC load): 2,000,000 (min)
Setpoint relay response time: <100 ms
Materials exposed to vacuum: Stainless Steel 316
Internal volume: KF16 flange 1.023 cm
3
VCR4 flange 1.469 cm
3
VCR8 flange 2.627 cm
3
Electronics casing material: Stainless steel 304
Flange material: Stainless steel 316
Weight: KF16 flange 170 g
VCR4 flange 191 g
VCR8 flange 221 g
Operating temperature: 0 to 40 °C (32 to 104 °F)
Bake out temperature (non-operating): 100 °C (212 °F)
Humidity: 0–95% Non-condensing
Ingress Protection Rating: IP40
(2)
(1) Accuracy and repeatability are typical values measured in Nitrogen atmosphere after zero adjustment at ambient temperature.
(2) IP54 version available.