MKS PSR1A - User Manual

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PSR1A/PSR4A POWER SUPPLY AND

PRESSURE/FLOW READOUT

SINGLE / MULTI-CHANNEL POWER SUPPLY / READOUT

User Manual

MKS P/N 20068380-001 Rev A

FAX: (978) 557.5100

E-MAIL: MKS@MKSINST.COM

WWW.MKSINST.COM

2 TECH DRIVE SUITE 201

ANDOVER, MA 02810 USA

(978) 645.5500

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MKS PSR1A Specifications

General