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MKS 247D User Manual

MKS 247D
100 pages
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120714-P1
Rev A, 7/97
Instruction Manual
MKS Type 247D
Four-Channel Readout
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

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MKS 247D Specifications

General IconGeneral
BrandMKS
Model247D
CategoryPower Supply
LanguageEnglish

Summary

Safety Information

Safety Procedures and Precautions

General Safety Precautions

Covers modification, service, grounding, proper fittings, and power cord usage.

Operational Safety Limits

Details safe power source, fuse usage, and explosive atmosphere avoidance.

Chapter Two: Installation

Chapter Three: Overview

Front Panel Controls

Identifies and illustrates the location of controls on the front panel of the 247 controller.

Front Panel Control Details

Describes specific front panel controls like switches, meters, and selectors.

Rear Panel Controls

Identifies and illustrates the location of controls on the rear panel of the 247 controller.

Scaling Controls

Explains how scaling controls adjust voltage signals to display flow rate and set point directly.

Scaling Control Factor

Defines the Scaling Control Factor as a product of Gauge and Gas Correction Factors.

Scaling Control Potentiometer Adjustment

Provides instructions on how to adjust the Scaling Control Potentiometer for proper scaling.

Scaling Control Potentiometers

Describes the purpose and function of the scaling control potentiometers.

Gas Correction Factor (GCF)

Explains the Gas Correction Factor's role in adjusting for different gases.

Chapter Four: Operation

How To Setup the System

Provides a comprehensive guide for setting up the 247 unit and connected MFCs.

Scaling Control Factor Calculation

Details how to calculate the Scaling Control Factor using Gauge and Gas Correction Factors.

Scaling Control Potentiometer Adjustment

Guides the user through adjusting the Scaling Control Potentiometer to set the calculated factors.

How To Manually Control Ratioed Gas Flows

Instructions for controlling multiple gas flows as a fraction of a primary channel's flow.

How To Change the Dipswitch Settings

Provides instructions for configuring dipswitch S15 for external set point control.

External Flow Control Modes

Describes controlling individual gas flows and pressure with ratioed flows using external controllers.

Controller Setup for Pressure Control

Outlines steps to set up an external controller for pressure control applications.

247 Unit Setup for Pressure Control

Details how to configure the 247 unit to work with an external controller for pressure control.

Remote Flow Control with TTL Logic

Explains how to use TTL logic signals for remote flow control and ON/OFF operation.

How To Manually Control Individual Gas Flows

Step-by-step instructions for manually controlling individual gas flows using internal set points.

Chapter Five: Maintenance and Troubleshooting

Troubleshooting Approach

Introduces troubleshooting by isolating sections, starting with power supply diagnostics.

Component Troubleshooting

Guides troubleshooting for channel amplifiers, voltage references, ratio amplifier, DPM, and set point circuits.

Appendix C: Gas Correction Factors for Commonly Used Pure Gases

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