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MKS 247D - Index

MKS 247D
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Index
87
Index
A
AC line cord, 44
C
Cables
CE requirements, 20, 22
ordering, 32
part numbers, 20
CE mark
cables, 20, 22
description of, 20
specifications, 79
Connectors
interface P5 (channel 1), 33
interface P6 (channels 1 to 4), 32
MFC (J1 to J4), 34
Controller
setup, 67
zero adjustment, 67
Customer support, 18
D
Dipswitch S15
+1 V FS input, 65
+5 V FS input, 64
initial settings, 64
E
Electrical information
fuses, 30, 71
External flow control
controller setup, 67
individual gas flows, 28, 38, 66
ratioed gas flows, 28, 6668, 38, 6668
system setup, 68
F
Front panel controls, 4042
Fuses, 30, 71
G
Gas correction factors
description of, 47, 49
gas mixtures, 51
list of, 8386
pure gases, 50
reference temperature, 49
Gauge factors, 47, 56
I
Installation Category, 23
L
Line voltage, 44
M
Maintenance, 71
Manual flow control
individual gas flows, 27, 37, 59, 63
ratioed gas flows, 27, 37, 6162
Manual, organization of, 18
Model code, 81
Mounting instructions
247 unit, 26
MFCs, 26

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