MKS 247D - System Configurations; Figure 3: Manual Flow Control

Chapter Two: Installation Setu
p
27
System Configurations
The 247 unit can be configured for manual, external set point, or remote operation. The various
system configurations and the required cabling are shown in Figure 3, page 27, and Figure 4,
page 28. The system interface cables are listed in Table 5, page 20.
Refer to
Chapter Four: Operation
, page 55, for information on the setup and operation of these
systems.
Manual Flow Control
Figure 3 illustrates a simple manual control system which requires only the use of the MFC
interface cables.
With this configuration, the flow rate for each gas can be individually controlled with a front
panel SET POINT CONTROL, or Channels 2 to 4 can be ratioed to the flow in Channel 1.
Another four channels may be additionally ratioed to Channel 1 by adding a second 247 unit to
the system.
Note
An extra
p
ower su
pp
l
y
is needed if usin
g
more than two 1559 MFCs with
one 247 unit.
Figure 3: Manual Flow Control