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MKS 247D - Interface Cables; System Interface Cables; Table 5: System Interface Cables

MKS 247D
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Interface Cables Cha
p
ter Two: Installation
20
Interface Cables
As of January 1, 1996, most products shipped to the European Community must comply with the
EMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. In
addition, as of January 1, 1997, some products shipped to the European Community must also
comply with the Product Safety Directive 92/59/EEC and Low-Voltage Directive 73/23/EEC,
which cover general safety practices for design and workmanship. MKS products that meet
these requirements are identified by application of the CE mark.
To ensure compliance with EMC Directive 89/336/EEC, an overall metal braided shielded cable,
properly grounded at both ends, is required during use. No additional installation requirements
are necessary to ensure compliance with Directives 92/59/EEC and 73/23/EEC.
Note
1.
Overall metal braided shielded cables, properly grounded at both
ends, are required to meet CE specifications.
2.
To order metal braided shielded cables, add an S after the cable
type designation. For example, to order a standard cable to connect
the 247 unit to a Type 1679A MFC, use part number CB259-5-10;
for a metal braided shielded cable, use part number CB259S-5-10.
System Interface Cables
The system interface cables include cables to connect the 247 unit to a mass flow device, an
external controller, a power supply, or another 247 unit.
System Interface Cables
To Connect the 247 Unit To... Use the MKS Cable...
Standard Shielded
Mass Flow Controllers/Meters
258, 358, 558, 1150*, 1151*, 1152*, 1159,
1162, 1259, 1261, 1359, 1449, 1559**, 1562,
1678, 1679A, 2159, 2162, 2259
1179A, 2179A, 1479A, and 1679B with 15-pin
Type D connectors
CB259-5-10 CB259S-5-10
Mass Flow Controllers/Meters
1462, 1661
1179A, 2179A, 1479A, and 1679B with 9-pin
Type D connectors
CB147-12-10 CB147S-12-10
1160, 1163, 1461, 2160, 2163 MFC CB259-10-10 CB259S-10-10
Table 5: System Interface Cables
(Continued on next page)

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