MKS 247D - Chapter One: General Information; Introduction

Chapter One: General Information Introduction
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Chapter One: General Information
Introduction
The MKS Type 247D Four-Channel Mass Flow Controller Power Supply/Readout is designed as
power supply/readout and set point source for four analog mass flow controllers (MFCs). The
unit can also power and monitor the flow rate through analog mass flow meters (MFMs).
The 247 unit consists of a power supply, four signal conditioning channels, four set point
circuits, and a digital panel meter (DPM) to display the flow rate of any single channel of a MFC
or MFM. It may be used to monitor and provide set point levels for MFCs and to provide ratioed
set points for multiple gas control.
The 247 unit is a versatile instrument that may be used separately or as part of a larger control
system. The unit can be operated manually via the front panel controls, through an external
controller, or through remote TTL logic control.
The 247 readout is primarily designed to interface with MKS analog mass flow controllers;
however, with the proper interface cable, you can use most major MFCs. Refer to Table 5,
page 20, for a list of MKS interface cables.