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MKS 247D - Set Point and Zero Adjustments

MKS 247D
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Front Panel Controls Cha
p
ter Three: Overview
42
Set Point Control
This 20-turn potentiometer sets the set point level when the Set Point Source Switch is in the
FLOW or RATIO position. The ranges are:
FLOW Position: ± 0.1 to 100% of Full Rated Flow
RATIO Position: ± 0.1 to 100% of Channel 1 Flow/Ext. Ratio Signal
Read / Set Point Switch
This spring loaded switch allows you to read, from the Digital Panel Meter, either the flow rate
or the set point value (which may be going to the MFC through the front panel flow switch).
This allows you to check or set the MFCs zero, check or set the set point level, and check for an
agreement between flow and set point when the MFC is so commanded.
The Scaling Controls on the rear panel (refer to Figure 6, page 43) must be properly set for the
meter to display a
direct
set point reading, in sccm or slm. Refer to
Scaling Controls
, page 46,
for more information.
Zero Control
This 20-turn potentiometer is used for fine zero adjustment. It has a limited range of ±3% of FS;
therefore, larger adjustments must be made with the zero control on the MFC.

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