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MKS 247D - Set Point Function with Remote Flow Control

MKS 247D
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Chapter Three: Overview Set Point Si
g
nal
39
Set Point Function with Remote Flow Control
The SET POINT SOURCE SWITCH must be set
to the EXT position, when using remote flow
control.
Interface connector P6 provides the means to remotely turn the flow on/off and to adjust and
monitor the flow rate in any channel using a set point signal from a voltage applied to P6.
Refer to
How To Control Gas Flow with TTL Logic
, page 69, for more information.

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