MKS 247D - MFC Connectors (J1 - J4); Table 9: MFC Interface Connectors (J1

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Connectors and Cables Cha

ter Two: Installation

MFC Connectors (J1 - J4)

The four 15-pin Type “D” connectors (J1 through J4), located on the rear panel (refer to

Figure 6, page 43), provide the connection for the mass flow controllers. Each connector

provides the necessary power and set point voltages, and receives the flow output signal.

MFC Interface Connectors (J1 - J4) Pinout

Pin Assignment

1 No Connection

2 Flow Input Signal

3 No Connection

4 No Connection

5 Power Ground

6 -15 Volts

7 +15 Volts

8 Set Point Output Signal

9 No Connection

10 Input Stage Output

11 No Connection

12 Signal Ground

13 No Connection

14 No Connection

15 Chassis Ground

Table 9: MFC Interface Connectors (J1 - J4) Pinout

Note

The “No Connection” pin assignment refers to a pin with no internal

connection.

An extra power supply is needed if using more than two 1559 MFCs

with one 247 unit.

MKS 247D - MFC Connectors (J1 - J4); Table 9: MFC Interface Connectors (J1 - J4) Pinout