Chapter Three: Overview Rear Panel Controls
45
Interface Connector J5 - Channel 1
This 9-pin Type “D” connector is used to connect two 247 units or to connect a 247 unit to an
external pressure controller.
Individual flow rates are set, using the front panel Set Point Controls, as a fraction of Channel 1
of the first 247 unit; this ratio is maintained while the total flow is adjusted to maintain the
desired pressure. When two 247 units are attached, four additional MFCs can be ratioed to
Channel 1 of the first 247 unit.
When a 247 unit is connected to an external pressure controller, the controller provides the
pressure control signal (PCS) that can be applied to all set point controls on the 247 unit.
Refer to Table 8, page 33, for the Interface Connector J5 pinout.
Note
The MFC that is set to control at the highest percentage of its rated flow
should be connected to Channel 1.
MFC Connectors
These 15-pin Type “D” connectors (J1 through J4) provide the connection for the mass flow
controllers. Each connector provides the necessary power and set point voltages, and receives the
flow output signal.
Refer to Table 9, page 34, for the MFC Connector pinout.
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