MKS 247D - Page 100

Index
88
O
Operation
flow signal path, 35
functional description, 35
P
PCS, 67
Pollution Degree, 23
Power requirements, 26, 44, 79
R
Ratio, gas, 66
Rear panel controls, 43–45
Remote flow control
TTL logic control, 29, 69
Returning the product, 18, 19
S
Safety messages, definitions of
english, 1
french, 9
german, 5
spanish, 13
Safety procedures and precautions
english, 3–4
french, 11–12
german, 7–8
spanish, 15–16
Scaling controls
description of, 46–48
scaling control factor, 47, 56
scaling control potentiometer, 48, 57
Serial number label, 53
Set point signal source, 36
Specifications, 79–80
Symbols, definitions of
english, 2
french, 10
german, 6
spanish, 14
System setup, 55–58
T
Temperature, operating, 23
Troubleshooting, 73–77
TTL logic control, 69
U
Unpacking checklist, 19
W
Warm up
controller, 67
MFC, 58
Z
Zero adjustment
controller, 67
MFC, 58