MKS 247D - Page 98

A
pp
endix C: Gas Correction Factors for Commonl
y
Used Pure Gases
86
Gas Correction Factors for Pure Gases
(Continued)
GAS SYMBOL SPECIFIC HEAT, Cp
cal/g
o
C
DENSITY
g/l @ 0
o
C
CONVERSION
FACTOR
Sulfur Hexafluoride
Trichlorofluoromethane
(Freon - 11)
Trichlorosilane
1,1,2-Trichloro - 1,2,2-Trifluoroethane
(Freon - 113)
Tungsten Hexafluoride
Xenon
SF
6
CCl
3
F
SiHCl
3
CCl
2
FCClF
2
or
(C
2
Cl
3
F
3
)
WF
6
Xe
0.1592
0.1357
0.1380
0.161
0.0810
0.0378
6.516
6.129
6.043
8.360
13.28
5.858
0.26
0.33
0.33
0.20
0.25
1.32
1
Empirically defined.
2
Consult MKS Instruments, Inc. for special applications.
3
The GCF for Oxygen is 0.993 when using
thermal
MFCs such as the Type 1179, 1479, 1679, 1159, and 1259 units, and related
products. The GCF for Oxygen is 1.000, as listed in the table, for pressure based MFCs such as the Type 1640, 1150, 1151, 1152, and
1153 units.
NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia).
Standard Temperature is defined as 0
o
C
Table 17: Gas Correction Factors for Pure Gases