EasyManua.ls Logo

MKS 247D - Ratioed Gas Flow Control Steps

MKS 247D
100 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
Manual Flow Control Cha
p
ter Four: O
p
eration
62
3. Leave the SET POINT SOURCE SWITCH for Channel 1 in the FLOW position and
move the switches for Channels 2 to 4 to the RATIO position.
The 247 unit is now adjusted to control the MFCs connected to Channels 2 through 4 to
75, 50, and 25% of the flow rate through Channel 1.
4. Turn the flow on by placing the FLOW CONTROL SWITCH for all channels to the ON
position.
The set point signal is applied to the MFC, the Flow Indicator LED illuminates, and flow
begins after a slight delay. The correct flow is realized within approximately 1.5
seconds, depending on the type of MFC being used.
Note
The flow through any channel can be displayed on the Digital Panel
Meter by placing the Channel Selector Switch to that channel.
5. Turn the flow off by placing the FLOW CONTROL SWITCH for all channels to the
OFF position.

Table of Contents

Related product manuals