VAA46003-R.3659.A
- R6･ E7900 -
Item Criteria Applied tool(s)
Finder
View / Image
Visual field frame/
frame line
Dust, fluff and damage
・ There must be no blur, distortion, ghost, halation or other out-
standing troubles in contrast, gradation, etc.
・ There must be no noticeable unevenness.
・ You can see the object clearly without blur or difference in thick-
ness.
・ The position and quantity must be as follows
Zone
Size
A B C
Less than 10μm 0 pc 2pcs or less 3pcs or less
10 ～ 20μm 0 pc 0 pc 1pcs or less
More than 20μm 0 pc 0 pc 0 pcs
Total: 3 pcs. or less Interval: b/2 or more (half the long side or
more)
The size and quantity of blurred pieces depend upon a limit
sample.
Visual observation
Visual observation
Visual observation
b/6
b/2
b
a/8
a/2
a
A
B
C
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