Nikon HVBTR-1200 - Chapter IV. Performance and Specifications; Style; Digital Read out; Motion Control

- 15 -
Chapter IV. Performance and Specifications
4.1 Style
•
Type: Single-column X-Y stage type
•
Dimensions (W × D × H)
Main body: 565 × 690 × 740 mm (in clamped condition)
Controller: 145 × 400 × 390 mm
Joystick box: 100 × 177 × 98 mm
Special measurement table: 650 × 700 × 600 mm
•
Mass
Main body (including head): 72 kg
Controller: 13 kg
Joystick unit: 1 kg
4.2 Digital Read Out
•
Measurement range: 255 × 205 × 155 mm (X × Y × Z)
•
Measurement method: Diascopic linear encoder
•
Minimum resolution: 0.1 µm
4.3 Motion Control
•
Drive method: All-axis DC servo motor
•
Maximum drive speed: X,Y: 100 mm/s
Z: 50 mm/s
•
Positioning accuracy: 1.0 µm (for X, Y, Z)