Nikon HVBTR-1200 - Measurement Accuracy; Operating Conditions

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4.5 Measurement Accuracy
•
Total accuracy (X, Y axes)
When a traceable standard scale or a conforming evaporation pattern is placed on the
stage glass and is measured with a fixed zoom position, at the center of the viewfield (“L”
represents any measured length in mm)
Repeatability (when magnification is 3.5
×
): 1 µm (2σ)
Maximum permissible indication error for single-axis
measurement MPE
E1
(when magnification is 3.5
×
): 2 + 8L/1000 µm
Maximum permissible indication error for dual-axis
measurement MPE
E2
(when magnification is 3.5
×
): 3 + 8L/1000 µm
•
Total accuracy (Z axis)
Indication error for measurement using a laser scale
Maximum permissible indication error for single-axis
measurement MPE
E1
: 3 + L/50µm
4.6 Operating Conditions
•
Operating environment
Temperature: 10 °C to 35 °C
Humidity: 70% max.
Altitude: 2000 m max.
Pollution: Degree 2
Indoor use only
•
Environment in which accuracy is guaranteed
Temperature: 20 °C ± 0.5 K
•
Floor strength
Average load bearing capacity: Must be able to bear the mass on the total floor surface,
including the maximum mass of the system (main body
with parts and components assembled: 140 kg;
miscellaneous: 50 kg)
Collapsing load: Greater than the total mass of main body with parts and
components assembled
•
Permissible floor vibration
Vibration frequency of 10 Hz or less: Amplitude of 3 µm
P-P
max.
Vibration frequency of 10 to 1000 Hz: Vibration acceleration of 0.012 m/s
2
(1.2 gal) max.