CREATE/DEVELOP A RECIPE (3/3)
Parameters Info:
FWD: Forwarded Power, Power applied
to the electrode(s)
REF: Reflected Power, should be ≤ 7
Watts. When tuning in Auto mode
automatically reduced to minimum
value,ideal 0 Watt.
RF TIME: RF on time while reflected
power ≤ 7 Watts in seconds
PRESSURE: Without IPC the expected
average system pressure. With IPC the
set value to reach. Standard in m T.
GAS x: Gas flow in standard cubic
centimeter per minute (SCCM)
RANGE: The allowed plus/minus
pressure swing around the set system
pressure.
BASE: is the vacuum level the system
will pump to prior starting the gas flow.
RF will turn on after the gas stable time
set by the gas stable timer. The gas
stable timer can be found Main Screen->
Parameters -> Gas stable Time.