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NT-MDT NTEGRA Spectra - 1.3.1. Optical Measuring Head

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Chapter 1. Basic Information
Fig. 1-3. Parts of the SNOM module
1 replaceable panel; 2 optical tube; 3 positioning device;
4 – laser beam delivery system KineFlex;5 PMT module;
6 hollow sample holder; 7 set of substrates; 8 fixing screws
1.3.1. Optical Measuring Head
The optical measuring head (hereafter, measuring head) consists of the following parts:
Optical detection system;
Universal objective;
Universal objective holder;
Probe holder.
The optical cantilever deflection detection system 1 is mounted on the objective holder 2
(Fig. 1-4). The objective is suspended in an arrangement of elastically deformed arms.
This arrangement provides high accuracy of focusing and mechanical stability of the
device. The head mount 3 is equipped with microscrews for positioning the probe.
Fig. 1-4. Basic parts of the measuring head
1 optical detection module; 2 objective holder;
3 base unit with the probe holder and positioning mechanisms
5