Chapter 1. Basic Information
1.5. Operating Conditions
To provide for the normal operation of the device, it is recommended to observe the
following conditions:
− environment temperature: (25 ± 10) °C;
− temperature drift less than 1 °C per hour;
− relative humidity at +25 °С less than (65 ± 15) %;
− range of purity 7 – 8 (by ISO 14644-1);
− vibration amplitude
in the band 1 ÷ 1000 Hz less 0.5 µm;
− atmospheric pressure 760 ± 25 mm Hg;
− the work area should be supplied with a protective grounding circuitry and with
grounded electric mains (110/220 V);
− electric mains:
- voltage 110/220 V (+10 % / –15 %),
- frequency 50/60 Hz;
− the room should be protected from mechanical vibrations and acoustic noises, either
internal or external;
− vibration criterion VC-C, 12.5 µm/s (one-third octave band criterion);
− the device should be protected from the direct sun radiation impact;
− to provide solid stability against vibrations, SPM modules should be placed on self-
leveling floor with marble covering alongside bearing components of the building
(pillows, beams etc.);
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