Document No.: 1P0446-1 Rev. B, April 7, 2014
4.3 System Assembly
The IoN 3 MHz plasma system is a tabletop system and essentially comes pre-assembled. Devote
attention to providing a good facility services infrastructure to the system:
x a sturdy surface in a ventilated location with ample work allowance
x proper electrical outlets for the system and vacuum pump, dedicated circuits if possible
x regulated corrosion-resistant process gas delivery (if used)
x pump exhaust capability
The pump exhaust should have an exhaust line that vents outside of the facility. To ensure rapid
pump-down times, position pump as close as possible to the IoN 3 MHz, but not on same surface
(due to possible vibration from the pump).
SYSTEM CONNECTIONS
1. With a voltmeter verify the line voltage is correct, then plug in the system AC cord.
2. Make sure the circuit breaker on the back of the IoN 3 MHz is in the up (on) position.
3. Connect vacuum pump to the system with a vacuum hose and a KF25 flange connection.
4. Make sure the pump has been charged with oil, then plug in the vacuum pump AC cord.
Figure 4-2 system connections
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