Document No.: 1P0446-1 Rev. B, April 7, 2014
VACUUM PUMP EXHAUST
Depending on process gasses used and pump down frequency, the vacuum pump exhaust may be
routed through an oil mist eliminator (OME) into the room, vented outside the building for high
production use or treated as a hazardous gas. Exhaust gas connection on the pump is an NW40 (1
½”forIoN100/140andNW25forIoN40).Consultanindustrialhygienistforexhausttreatment
options.
Note: Your vacuum pump WILL emit exhaust gases.
All oil lubricated vacuum pumps emit exhaust gases (atomized oil, byproducts of plasma processing
and whatever residual process gases that are used, IE, Oxygen, Argon etc). During high production
use or where higher base pressures are utilized it is recommended to connect the output of the
exhaust filter (ARS or mist eliminator) to a ventilation system that will pull the gases away from the
pump and system and dilute them into a scrubber or the atmosphere. Always consider the process
gases being used. Hazardous gas emissions must be handled in according with applicable
environmental safety regulations. When using ventilation exhaust tubing, oil mist will tend to
condensate on the tube walls and not free float into the atmosphere, thereby resulting in minimal gas
emissions. By ventilating exhaust emissions away from the pump, this eliminates any oil mist in the
room or area where the pump is located and eliminates any oil dripping or leaking onto any adjacent
surface or floor.
OIL MIST ELIMINATOR ORIENTATION
Oil Mist eliminators should be oriented in an upright position (body of the filter is lower than the
outlet). If placed on its side (body of the filter even with the outlet), if allowable by the vacuum pump
design, it is possible that condensed oil may leak out. Consult PVA TePla America or the vacuum
pump manufacturer for further clarification if necessary.
SAFETY INTERLOCKS
Check the safey interlocks periodically. They can be tested by pushing them in and out.
Table 2 System Maintenance Checklist
8.3 Troubleshooting
The following troubleshooting section is designed to help the operator identify and solve the most
common instrument problems. Any major equipment repairs should be performed by PVA TePla
America Inc. service engineers. If you are unable to identify a problem, call the PVA TePla America
Inc. service department.
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