Document No.: 1P0446-1 Rev. B, April 7, 2014
1.3 Equipment Options
This is a list of non-standard system accessories. Your IoN 3 MHz can be upgraded to include any of
these options. For additional information, contact PVA TePla America Inc.
VACUUM PUMP
PVA TePla America recommends a 7 cfm, 2 stage, rotary vane pump, prepared for Fomblin oil. It is
recommended that Fomblin oil be used for oxygen gas applications as well as other gas mixtures.
Note: The sound pressure level with the above pump is 50 dB.
PUMP OIL MIST ELIMINATOR
Collects and condenses the oil mist generated during pump operation. This leads to lower pump oil
consumption and a cleaner operation.
If the system is to be run with a fluorine based process gas, a mist eliminator is suggested.
SPARE PARTS KIT
Includes spare parts that will be required for normal preventative maintenance. Includes chamber
door o-ring seal, viewport window, chamber o-ring, and rear chamber o-ring.
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