Document No.: 1P0446-1 Rev. B, April 7, 2014
PROCEDURE FOR ADJUSTING GAS FLOW AND PRESSURE
Gas flow into the chamber must be controlled to achieve proper operating pressure. This is easily
accomplished through use of the system flowmeter. The gas solenoid valve will not allow gas into the
chamber unless all system safety conditions have been met.
The IoN 3 MHz provides a means of monitoring chamber pressure. A pressure gage is mounted in the
rear port of the IoN 3 MHz chamber, and will report a pressure reading on the front DISPLAY. This
pressure reading will give a relative measure of the system pressure, and is meant to provide a low
cost means of monitoring pressure. The operator will need to note the pressure readings on the
DISPLAY and know the relationship of the displayed number to the process required.
Normal operating pressure will range between .5 Torr and 1.2 Torr.
BEGIN OPERATION
With the system pumped down and flowing gas, adding RF power will strike a plasma. Consult the
Operation Procedures
chapter of this manual for a detailed
Standard Operating Procedure
to
accomplish these steps.
To Next Page
Loading...