PVA TePla IoN 3 - Page 7

Document No.: 1P0446-1 Rev. B, April 7, 2014
7
Each flowmeter has a solenoid valve that shuts off the flow of gas, thus retaining the setting of the
respective flowmeter for a subsequent process. For added safety, the gas solenoid for each
flowmeter will not allow gas to flow into the chamber until all interlocks are activated.
Note: The inlet pressure from the gas bottle should be regulated to 10 psig before the gas is
introduced to the back of the IoN 3 MHz.
Table 1 Flowmeter Calibration Data
float material: GLASS BALL float density: 2.55 G/CC
metered Temp: 70ºF metered Pressure: 10 PSIG
tube #A-125-3 units: CC/MIN
scale
O2
Argon
Freon14
SF6
65.0
68.56
47.62
44.82
34.61
60.0
59.20
41.31
39.05
30.16
55.0
49.84
35.03
33.31
25.71
50.0
41.30
29.16
27.83
21.49
45.0
34.17
24.09
22.93
17.70
40.0
28.41
19.71
18.61
14.37
35.0
23.53
15.79
14.86
11.47
30.0
19.21
12.44
11.68
9.02
25.0
15.01
9.69
9.03
6.97
20.0
11.30
7.40
6.81
5.26
15.0
8.46
5.39
4.90
3.78
10.0
6.10
3.54
3.15
2.43
5.0
3.74
1.69
PRESSURE INDICATOR
The IoN 3 MHz will report the actual pressure reading (accurate within 20 mTorr) on the front
PRESSURE display. This pressure reading will give a reading of the chamber pressure. After the
PROCESS START button has been depressed, the pressure sensor signals the system logic to start the
process (RF and gas flow) when a crossover pressure of .35 Torr (350mT) has been achieved.
The PRESSURE indicator does not display a reading until reaching a pressure below 2 Torr. The
pressure sensor has a range of around .01 Torr (10 mTorr) to 2 Torr. Normal operating pressure will
range between .5 Torr (500mT) and 1.2 Torr.
DIAGNOSTIC LED DISPLAY INDICATORS
Five LED display indicators are located on the lower front panel of the IoN 3 MHz system. When
illuminated, the LEDs provide the user confirmation that all the system modules are functioning
correctly.